High purity gases

Hydrogen Chloride Anhydrous Liquid 5.0N CAS No.:7647-01-0

Product description: HCL,Hydrogen Chloride,HCl Gas,Anhydrous Hydrogen Chloride,99.9%(99.999%,99.99999%) Purity HCl Gas,7647-01-0 In the production of large scale integrate Circuit, gas phase polishing of monocrystalline
INQUIRY

Introduction			Use			Safety Mark
Liquid Gas Installed in the Cylinder			In the production of large scale integrate Circuit, gas phase polishing of monocrystalline Silicon, ething of Epitaxial base .			Hazard Class：2.3
Strong Causticity under Water						UN Number: 1050
Strong Stimulation						CN Number: 22022
Inhalation Toxicity						CAS Number: 7647-01-0
Expiry Date: 2 Years						Safety Warning：Corrosivity
						Occupational exposure limit MAC（mg/m³）: 7.5mg/m³
						Emergency Phone Number：0532-68081808

Cylinder	Variety：Hydrogen Chloride Cylinder				Cylinder Valves		Type： Diaphragm
	Gas Package：25kg/250kg/660kg						Interface： CGA330/DISS634/DIN-8
	Bottle Pressure： 4.2MPa(20℃)						Valve Body Material：Corrosion resistant 316L stainless steel

Level :VLSI Purity≥99.999% Testing：Batch Test

		Composition		Specification GB/T24469-2009		Testing instrument		Detection limit
Impurities 1X10^-6（）		Nitrogen		≤2.00		DID Chromatograph		0.01
		Oxygen + Argon		≤1.00		DID Chromatograph		0.01
		Methane + acetylene		≤1.00		DID Chromatograph		0.01
		Carbon Monoxide		≤2.00		DID Chromatograph		0.01
		Carbon Dioxide		≤2.00		DID Chromatograph		0.01
		H₂O		≤1.00		ORDS Water Meter		0.001
Metal Ions 1X10^-6（）		Iron		≤0.50		Plasma emission spectrum		0.001
		Nickel		≤0.10		Plasma emission spectrum		0.001
		Copper		≤0.10		Plasma emission spectrum		0.001
		Cobalt		≤0.10		Plasma emission spectrum		0.001
		Manganese		≤0.10		Plasma emission spectrum		0.001
		Chrome		≤0.10		Plasma emission spectrum		0.001